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Measurement Principle

This measurement technique is used to evaluate thin-film thickness and surface roughness. It operates by using a precision probe that lightly touches the sample surface while maintaining a constant applied force.

As the probe moves across the surface, any bumps, dips, or thickness variations cause the probe to move upward or downward in order to keep the force unchanged. These vertical displacements are recorded and processed to generate a surface profile map, from which both surface roughness and film thickness can be accurately determined.

References：KEYENCE