/ Plasma Polymerization /
Process Characteristics:
- Different from conventional polymerization methods
- Allows the use of monomers that cannot be applied in traditional polymerization
- Resulting polymer films exhibit high crosslinking, chemical inertness, excellent insulation, high thermal stability, and defect-free structure
Principle Overview:
- High voltage ionizes the gas → forming plasma
- Plasma collides with the introduced monomer → breaking molecular bonds and creating radicals
- Radicals recombine and polymerize → depositing onto the substrate to form a polymer thin film
Tunable Parameters / Influencing Factors:
- Monomer ratio:Affects polymer structure and properties (intact monomers vs. radical-dominated polymerization)
- Post-treatment reactions:Additional reactive gases can be introduced to further modify and control the polymerization results
